http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DD-146346-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9cbbee17ba1da59180b8b250a46c8994 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4e109c35f1805804d9ba2e176fc0a2b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1979-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac069af0a1f3f0351faaed2e0fbf4bd8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_393eb9c59a35ded556113a1a0adf575f |
| publicationDate | 1981-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DD-146346-A1 |
| titleOfInvention | METHOD FOR LOAD MEASUREMENT ON COMPONENT STRUCTURES WITH A CAPACITIVE COMPONENT |
| abstract | The invention relates to a method for charge measurement on component structures having a capacitive component and is used in particular in the process of producing microelectronic components, wherein the measurement time for determining the effective minority carrier lifetime tge of MIS capacitors and similar measurements on other multi-capacitor systems is substantially reduced. since the time duration for obtaining the thermodynamic equilibrium of the capacitive component is shortened by means of a floating electrode of the capacitive component and a registration of its relaxation process is ensured independently of the duration of its total relaxation. This is achieved in that the floating electrode of the component structure is contacted again within the total relaxation time of the component structure to be measured and is thereby charged with a potential suitable for setting the non-equilibrium state of the capacitive component. The reloading of the test pieces associated with this renewed contacting is registered and used to calculate the parameters sought. Fig. 1 {charge measurement; capacitive component; Device structure; floating electrode; relaxation; thermodynamic equilibrium; reloading; contact; Meszzeitverringerng; Potential difference} |
| priorityDate | 1979-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.