| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f0e04f0095074c7607b219b537c0062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b6cd30ababff133025c59e92556eea78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d05c4f9686ded42927da6b035cf565da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2153935d3632197f6fe3ffe96c9100e9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-46 |
| filingDate |
1979-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d193a2c4b352f0b8ae9c2470402829a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ac1f3df929d16b0f71d994c9e33f7af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0601efec0cb973dff6efbf167de6120f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_448758d58ef863405228aeccdded3b7a |
| publicationDate |
1984-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CS-231558-B1 |
| titleOfInvention |
Method of ionisation of stream of particles and device to perform the method |
| priorityDate |
1978-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |