http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-217820011-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b8a8f0fc6dc7dc00ea99a34d6010487a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-78 |
| filingDate | 2022-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95c36df4e6784ba163b0b404c3c29992 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f1ec04af5cb823238b5f8719625e395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf82e0664a698228d78b6f7cd031e244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e971114ffa2c682e478314125bce802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddf3e487f2862562a85853910ef4f4f3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bff262c2e95d21c8b2d904face133d47 |
| publicationDate | 2022-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-217820011-U |
| titleOfInvention | A continuous detection device for hydrogen peroxide concentration in wafer acidic cleaning solution |
| abstract | The utility model provides a continuous detection device for the concentration of hydrogen peroxide in the acid cleaning liquid of wafers, which can be used for detecting the concentration of hydrogen peroxide in the acid cleaning liquid after cleaning, and can detect continuously, and the detection time is short, and can Effectively improve detection efficiency. It includes a sample delivery pump for transporting samples, and it also includes a chromogenic agent delivery pump, a reaction color development unit, a color development sample delivery pump, a spectrocolorimetric unit A, a spectrocolorimetric unit B, and a density meter; the sample delivery pump and The sample inlet of the reaction chromogenic unit is connected, the chromogenic agent delivery pump is connected to the chromogenic agent inlet of the reaction chromogenic unit, the outlet of the reaction chromogenic unit is connected to the chromogenic sample delivery pump, and the chromogenic sample delivery pump passes through a three-way valve. They are respectively connected to the inlet of the spectrocolorimetric unit A and the inlet of the spectrocolorimetric unit B; the density meter is connected to a sample delivery pump. |
| priorityDate | 2022-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.