http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-217600631-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_71cbaecb1fc3c48712dea66627f40a97 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B29-02 |
| filingDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0a48a1691a63b92a25239a6901a6523 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38200ae5021ca5df6bbc25e83dd61035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5467cda6b6c6a22325fef0b01f98328b |
| publicationDate | 2022-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-217600631-U |
| titleOfInvention | Wafer one-side and two-side polishing system |
| abstract | The utility model discloses a novel polishing liquid packaging set, which comprises: a first packaging barrel and a second packaging barrel; a mechanical grinding precursor liquid is contained in the first packaging barrel, which contains abrasives and a first solvent; The chemical grinding precursor liquid is contained in the second packaging barrel, which contains an oxidizing agent and a second solvent, wherein a first opening is formed at one end of the first packaging barrel, so that the mechanical grinding precursor liquid can be output or input into the first packaging barrel A packaging barrel, one end of the second packaging barrel is formed with a second opening, so that the chemical grinding precursor liquid can be input or output from the second packaging barrel. The novel polishing liquid packaging set of the utility model has the advantages of improving high polishing efficiency and simultaneously reducing chip surface defects. |
| priorityDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 112.