http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-217384362-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13dfdcebacef67f0a418c865fa90a505 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-76 |
| filingDate | 2022-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff77fd59a518547699c0f4e35c96d7e8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d8b9a321048ace43e6f83ba4105f101 |
| publicationDate | 2022-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-217384362-U |
| titleOfInvention | Test device for testing steam stability of active cylinders |
| abstract | The utility model relates to a test device for testing the steam stability of an active steel cylinder. A carrier gas cylinder is connected with a mass flow controller, the mass flow controller is respectively connected with a mass flow meter and an active steel cylinder, and the active steel cylinder is placed in a water bath. , the active steel cylinder is connected with the mass flowmeter, the mass flowmeter is respectively connected with the pressure controller and the steam collection bottle, the steam collection bottle is connected with the pressure controller, the pressure controller is connected with the cold trap, and the cold trap is connected with the vacuum pump. Through the MFC matched to the gas type, the gas flow is adjusted to a quantitative carrier gas flow. The active cylinder is placed in a water bath and heated at a constant temperature within a certain temperature range. By changing the valve opening and closing, the direction of the carrier gas, source steam and After the carrier gas passes through the MFM, real-time flow data is obtained, and the source vapor is cooled in the collection bottle; the test line can basically test all liquid and solid precursors, and the same steel bottle can be used to compare the pros and cons of MO sources of different purity. |
| priorityDate | 2022-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.