http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-217298089-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d039ee23c6f31d771734889e505854f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B13-00 |
| filingDate | 2022-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30d74d8285393a716b108a1461789992 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc39529f2ea97bfcf143c013015cf329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0518311bf798c055ab7717a3a5201758 |
| publicationDate | 2022-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-217298089-U |
| titleOfInvention | Carrier device for cleaning graphite disks for MOCVD semiconductor epitaxial growth |
| abstract | The utility model discloses a bearing device for cleaning a graphite disk for MOCVD semiconductor epitaxial growth, comprising two oppositely arranged side plates and a plurality of supporting devices; wherein, the plurality of supporting devices are all arranged on the two sides between the plates, and the two ends of the plurality of supporting devices are respectively connected with the two side plates; the plurality of supporting devices enclose a storage space for storing graphite disks with an upward opening, the plurality of supporting devices Each device is provided with a plurality of limiting grooves, and the limiting grooves on the plurality of supporting devices are arranged in a one-to-one correspondence. The utility model realizes the bearing of a plurality of graphite disks, and has a simple and portable structure, which is beneficial to improve the cleaning efficiency and cleaning quality of the graphite disks. |
| priorityDate | 2022-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.