http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-217180735-U

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filingDate 2021-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-217180735-U
titleOfInvention A kind of detection device for trace amount of disilane in ammonia
abstract The utility model discloses a detection device for trace amount of disilane in ammonia. The technical scheme of the device is as follows: a detection disc is provided on the top surface of the detection disc, and six sample injection holes are initially provided on the top surface of the detection disc. A purge valve is connected; a quantitative pipe, the quantitative pipe is arranged on the top surface of the detection plate, and one end of the quantitative pipe is movably sleeved with the purge valve in the fourth interface, and the quantitative pipe The other end is movably sleeved with the purge valve in the sixth interface; the sample injection tube is movably sleeved inside the purge valve in the fifth interface; Ammonia gas is injected into the carrier gas tube, and the gas inside the quantitative tube is replaced with ammonia gas by rotating the rotary block, and then the gas in the quantitative tube is passed through the chromatographic column by rotating the rotary block to realize the separation of disilane and trisilane impurities. , and then pass the helium ionization detector to achieve the effect of detection and analysis.
priorityDate 2021-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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