http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-216669027-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0aec3975940c303fc0b173740e2ce8da |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-14 |
| filingDate | 2022-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95a3c13ccec1a15fd6f259bd6d48b6e3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44484a3f79f3939561d1da1c3388a293 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a788c00678e80f5288908062b9228e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6286bf42fe7c25f7d2fccbaa00aa1131 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_706a6db54f7320173906bc15e0d244ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a28cd4de6dd9a9abb6fa93ffe0b2630 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6a09f2b2eeecb9c8b7723628458d6c8 |
| publicationDate | 2022-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-216669027-U |
| titleOfInvention | A kind of crucible temperature measuring device and crucible |
| abstract | The application relates to the field of temperature control for the preparation of semiconductor materials, in particular, a temperature measurement device for a crucible includes: a temperature measurement component, the temperature measurement component includes: a thermocouple, the thermocouple is located in the crucible shaft, and the thermocouple is provided with a probe, the probe It extends to the bottom of the crucible; the fixing component is used to fix the thermocouple, the fixing component is located between the thermocouple and the inner wall of the crucible shaft, and the fixing component is respectively connected with the thermocouple and the inner wall of the crucible shaft. In the crucible temperature measurement device of the present application, it is beneficial to improve the concentricity of the thermocouple and the crucible shaft, reduce the possibility that the thermocouple will generate centrifugal force due to the low concentricity during the rotation of the crucible, thereby reducing the deformation of the thermocouple, and the When the inner wall collides, the technical problem of the short service life of the temperature measuring device in the prior art is solved, and the technical effect of prolonging the service life of the temperature measuring device is achieved. |
| priorityDate | 2022-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6335610 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099546 |
Total number of triples: 20.