http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-216560861-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8436e3a3acb365023303db3e8d1a8c93 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2021-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91061ac11a819aaa7e3ef667dd3558b2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30ba32097cbde6cbfbc78b2b08857a32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77378769672ada6cbb08d1e0b72b3100 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d0f6071335ae43f5467d27db5d695c5 |
| publicationDate | 2022-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-216560861-U |
| titleOfInvention | A wafer test boat with constant temperature heating function |
| abstract | The utility model relates to the technical field of wafer testing, in particular to a wafer testing crystal boat with a constant temperature heating function, comprising a box body; the box body is provided with a test cavity; the top of the box body is provided with a placing table; A heating module and a heat dissipation module are arranged on the placing table; a first temperature probe and a second temperature probe are arranged between the test cavity and the placing table; the first temperature probe is connected with the heating module; the second temperature probe is connected to the heating module; The temperature probe is connected with the heat dissipation module; a temperature controller is arranged on the placing table; the heating module and the heat dissipation module are respectively electrically connected with the temperature controller; and the box body is provided with a thermal insulation layer around the test cavity. By arranging components such as heating modules, temperature controllers, timers, temperature probes, heat dissipation modules and signal lines on the wafer test boat, the utility model enables the wafer to be tested immediately after heating, and the probe station does not need to wait. Production efficiency and equipment utilization. |
| priorityDate | 2021-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 |
Total number of triples: 20.