http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-215887222-U
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6a6f422b091ba12ea61d4adbf1b0e8e |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
filingDate | 2021-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7b57e11f19d35611e94f1923ea452c9 |
publicationDate | 2022-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-215887222-U |
titleOfInvention | Two-dimensional material gas phase preparation equipment |
abstract | The utility model discloses a device for preparing a two-dimensional material in a gas phase, which comprises the following steps: is characterized by mainly comprising a heating device, a reaction chamber, a gas path system, a vacuum system, a temperature control system, a substrate surface control device, a reactant uniform transmission component and a sample transmission component. The substrate surface control device has the main functions of processing and modifying the substrate surface required by preparing the two-dimensional material, and the reactant uniform transmission component has the main function of uniformly transmitting reactants (precursors) to the substrate surface. The device can obtain the substrate surface required by preparing the two-dimensional material, and accurately conveys the precursor to the substrate surface, thereby obtaining the control on the nucleation density and growth of the two-dimensional material on the substrate, and realizing the preparation of high-quality two-dimensional materials (films) on the large-size substrate surface. |
priorityDate | 2021-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547 |
Total number of triples: 14.