http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-214669461-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f5c7495de7f18211704eddc4a66b252e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K31-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2021-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbdfbc05c656f3a0a728276201aed655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1ca955aa2f0a8066e093d1d6bc9d7d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da9a3f17328277ff4204f17b7b938e7d |
| publicationDate | 2021-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-214669461-U |
| titleOfInvention | Probe station with vacuum degree adjusting system |
| abstract | The utility model relates to a take vacuum governing system's probe station, including probe station and vacuum governing system, the probe station includes casing and casing lid, and the casing lid forms the test chamber with the sealed cooperation of casing, is equipped with testboard and test probe in the test chamber, is equipped with gas inlet and evacuation gas port on the casing wall. The vacuum degree adjusting system comprises a gas atmosphere pipeline and a vacuumizing pipeline, wherein a gas flowmeter is arranged on the gas atmosphere pipeline, and a vacuum pump and a vacuum butterfly valve with a stepping motor are arranged on the vacuumizing pipeline. The vacuum butterfly valve is located upstream of the vacuum pump. The stepping motor is connected with a controller, a vacuum gauge is arranged on the shell, and the vacuum gauge is connected with the controller. The controller collects the numerical value of the vacuum gauge to adjust the opening of the vacuum butterfly valve so as to maintain the set vacuum value in the test cavity of the probe station, the gas flow of the input atmosphere is controlled by the gas flowmeter on the gas atmosphere pipeline, different vacuum degrees and different gas atmosphere environments can be applied to the test cavity, and the application range of the probe station is enlarged. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114739095-A |
| priorityDate | 2021-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 |
Total number of triples: 19.