http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-214218853-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4641649c823473d79aee26fdb5fd2abc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-064 |
| filingDate | 2020-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ad3ec37d0662c6514b9610ea5f9f21c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52086b8d173ae7e4c7eff24b9f6c7c15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cb20f65b6d19af31733d1ae5a7fc0be http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5a4a5a998063048e9ca417538f252de |
| publicationDate | 2021-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-214218853-U |
| titleOfInvention | Pyrolytic boron nitride deposition furnace |
| abstract | The utility model provides a pyrolytic boron nitride deposition furnace, pyrolytic boron nitride deposition furnace includes the furnace body, sets up at the last bell on furnace body top, sets up at the lower bell of furnace body bottom, sets up air inlet and the gas outlet of setting on the furnace body on the bell down, air inlet and gas outlet all communicate in the furnace body and outside the furnace body, go up the bell and enclose with lower bell and establish into the furnace chamber, mould, heater, heat preservation and water-cooling layer have set gradually by interior and outside in the furnace chamber, be provided with the water-cooling pipeline in the water-cooling layer, the water-cooling pipeline encircles the setting on the heat preservation, be provided with water inlet and delivery port on the lower bell, water inlet and delivery port are linked together with the both ends of water-cooling pipeline respectively, the heater is the circumference setting around the mould. Through the mutual matching of the heat-insulating layer, the water-cooling layer and the heater, the uniformity of gas atmosphere in the furnace and the uniformity of temperature of a temperature equalizing zone can be ensured, so that the effect of high-quality boron nitride deposition is achieved. |
| priorityDate | 2020-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 200.