http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-213357729-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14f974f1c136487762c33a9e40972414 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2020-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dcd8c7fe67c52a670528ee49542e7f6 |
| publicationDate | 2021-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-213357729-U |
| titleOfInvention | Transmission channel device and vacuum coating equipment |
| abstract | The utility model relates to a vacuum coating equipment field, concretely relates to transmission channel device, including the passageway body, this internal A passageway that supplies plasma to pass through that forms of passageway, the both ends of A passageway constitute A entry and A export respectively, are provided with the absorption unit that is arranged in adsorbing impurity component in the plasma on the inner wall of passageway body. The utility model provides a transmission channel device, it is at this internal A passageway that forms of passageway, and plasma passes through the A entry entering of A passageway one end to by the A export output of the A passageway other end, through set up the absorption unit on the inner wall of passageway body, realize the absorption to impurity component in the plasma, thereby improve the effect. In addition, the utility model also provides an use the coating equipment of above-mentioned transmission path device, it can be through improving transmission path device filter effect, realizes the improvement of coating film quality. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022001342-A1 |
| priorityDate | 2020-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341 |
Total number of triples: 15.