http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-213302426-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_126e13f085db9bd4d7dc752e8d21a589 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-02 |
| filingDate | 2020-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_143e227194af4fe8e44013fa3099bc8b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88a7d91ef9d24d79e5f4c81e6e584216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8cedcacaa7b9e46305f9be83742bfa7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9788e5f08601b1ce6aa869a526e6ec41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53381bbbac95007fa33e30ec014f60f0 |
| publicationDate | 2021-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-213302426-U |
| titleOfInvention | Quick hot calibrating device to Pin Fin base plate |
| abstract | The utility model relates to the field of semiconductor technology, specifically a quick hot calibrating device to Pin Fin base plate, including the electromagnetic heating board, different with prior art is: the upper surface of the electromagnetic heating plate is directly or indirectly abutted to the lower surface of a groove body made of a heat conductor material, the groove body is filled with fine sand, and a Pin Fin substrate to be measured is embedded into the fine sand. Compared with the prior art, the utility model discloses shorten calibration time, improved calibration efficiency. |
| priorityDate | 2020-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.