abstract |
The utility model relates to a semiconductor preparation technical field, concretely relates to boron oxide dewatering device, include: the crucible is used for containing boron oxide to be dehydrated; the crucible is arranged in the pot support; the heater surrounds the side and the bottom surface of the pot support, and the first heat preservation piece is arranged on the side of the heater in a surrounding mode. The device has high safety, stable operation, convenient use, low cost, high efficiency and obvious dehydration effect improvement. |