http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-212674712-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32c3079c89f237b0544d805bc0381e7d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-28 |
| filingDate | 2020-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830d4dee2c3283366ca1f167383b1685 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99ecfe0ff22057745dfebfd922b0f2a0 |
| publicationDate | 2021-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-212674712-U |
| titleOfInvention | Coil chip, detection chip and lubricating oil sensor based on micro-electro-mechanical system |
| abstract | The embodiment of the application provides a coil chip, a detection chip and a lubricating oil sensor based on a micro electro mechanical system. The coil chip based on the micro electro mechanical system comprises a substrate with a first surface and a second surface which are oppositely arranged, wherein at least two induction areas are arranged on the substrate; the base is provided with a first insulating layer and a second insulating layer on a first surface and a second surface in each induction area respectively, the first insulating layer is provided with at least one layer of induction coil layer on the surface far away from the second insulating layer, and the inner ring position of the induction coil layer is provided with a detection through hole which penetrates through the whole coil chip and is used for lubricating oil to pass through, so that an induction coil structure unit is formed in each induction area. The embodiment of the application provides a coil chip, a detection chip and a lubricating oil sensor based on a micro-electro-mechanical system, and can improve the detection sensitivity of the lubricating oil sensor. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022032610-A1 |
| priorityDate | 2020-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.