http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-212610885-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c54f297da4d6a8b837f5c8587ef7347a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-06 |
| filingDate | 2020-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cdfa3eef2d91aabe2169aba23e68b77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b9208d833cb16d30c3fd57a34bb4560 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eb315866c0688e2846d286d90609a3e |
| publicationDate | 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-212610885-U |
| titleOfInvention | Automatic switching system for crystal oscillator plates |
| abstract | The utility model relates to a detect technical field, concretely relates to wafer automatic switching system, include: a monitoring position suitable for setting a connecting terminal connected with the film thickness monitor; a heating position, wherein a heating device is arranged on the heating position; the bearing structure is at least provided with a first crystal oscillator piece placing position and a second crystal oscillator piece placing position, the first crystal oscillator piece placing position and the second crystal oscillator piece placing position are both suitable for being connected with the connecting terminal, and when the first crystal oscillator piece placing position or the second crystal oscillator piece placing position is opposite to the monitoring position and is connected with the connecting terminal, the second crystal oscillator piece placing position or the first crystal oscillator piece placing position is opposite to the heating position; and the driving device is used for driving the bearing structure to move. After heating, organic materials deposited on the crystal oscillator piece are evaporated, the driving device can drive the bearing structure to move, the crystal oscillator piece can move to the position relative to the monitoring position along with the crystal oscillator piece placing position again, the crystal oscillator piece can be repeatedly used, the using number of the crystal oscillator piece can be effectively reduced, and cost is reduced. |
| priorityDate | 2020-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415792644 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93125 |
Total number of triples: 17.