http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-212610864-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d4534af5ce92a436333e0f9f368f192c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00 |
| filingDate | 2020-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2eabce04df16319ec1dab9fd6ebf1c3d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4e1d8a3063ebc06f51cafb462c80ca0 |
| publicationDate | 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-212610864-U |
| titleOfInvention | Cleaning device for metal mask |
| abstract | The utility model discloses a cleaning device and a cleaning method of a metal mask plate, which relate to the technical field of mask plate cleaning and comprise a plasma generating device, wherein the metal mask plate is positioned in the plasma generating device, and plasma generated by the plasma generating device impacts the metal mask plate to lead residual materials on the surface of the metal mask plate to fall off and finish cleaning, the cleaning device of the utility model adopts argon as a medium, utilizes the plasma generated by the plasma generating device to clean the metal mask plate, can effectively avoid the problems of metal mask plate damage, resource waste, personal health damage, environmental pollution and the like caused by cleaning methods such as organic solvent and high temperature vaporization and the like, and can avoid the introduction of external pollution due to vacuum plasma cleaning, the recovered OLED material can be repeatedly utilized, greatly saves source cost and has good cleaning effect, the cleaning efficiency is high, the cleaning agent accords with the concept of green production, and large-scale mass production is facilitated. |
| priorityDate | 2020-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23968 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458357694 |
Total number of triples: 16.