http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-210506518-U
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb50eaf78089778620b312232f9ac99b http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e74277852f1aae0a3ff13f59a65456d |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 |
filingDate | 2019-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2020-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_072b5820a12ac03769e972c71e1b671c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10f02b4ff10dafb809644f4b81618250 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b216f4a200e789910f9bf0536b2f6b58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0dd9547236ae66376ff9ffdca92c59b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3832358e638fc07a23ceca22ed2fc8df http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8768820abc7ecafed1e17df802b592ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fa0f4620a62f3c468d377922b7aef75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aff672346099d8867d2937d18551da30 |
publicationDate | 2020-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-210506518-U |
titleOfInvention | A carrier for growing two-dimensional thin films by CVD |
abstract | The utility model provides a carrier for growing a two-dimensional thin film by a CVD method, which is applied to a CVD equipment. The carrier comprises a base, a bottom plate and a plurality of growth plates. The base has a first limiting structure; the base is arranged on the base, the lower surface of the base has a second limiting structure that cooperates with the first limiting structure, and the upper surface of the base has a third limiting structure; the base is provided with arched feet, It is easy to transport; a plurality of growth plates are used to carry a plurality of growth substrates, and the plurality of growth plates are stacked and arranged on the upper surface of the bottom plate; the lower surface of the lowest growth plate among the plurality of growth plates has the same limit as the third limit. A fourth limiting structure matched with the positioning structure; a fifth limiting structure and a sixth limiting structure cooperating with each other are respectively provided on two opposite surfaces of two adjacent growth plates. The carrier of the utility model cooperates with each other by means of the first to sixth limiting structures, so that the connection is firm, the dislocation or tilt is not easy to occur, and the carrier has the advantages of few parts and easy disassembly and assembly. |
priorityDate | 2019-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.