http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-210506518-U

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
filingDate 2019-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_072b5820a12ac03769e972c71e1b671c
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publicationDate 2020-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-210506518-U
titleOfInvention A carrier for growing two-dimensional thin films by CVD
abstract The utility model provides a carrier for growing a two-dimensional thin film by a CVD method, which is applied to a CVD equipment. The carrier comprises a base, a bottom plate and a plurality of growth plates. The base has a first limiting structure; the base is arranged on the base, the lower surface of the base has a second limiting structure that cooperates with the first limiting structure, and the upper surface of the base has a third limiting structure; the base is provided with arched feet, It is easy to transport; a plurality of growth plates are used to carry a plurality of growth substrates, and the plurality of growth plates are stacked and arranged on the upper surface of the bottom plate; the lower surface of the lowest growth plate among the plurality of growth plates has the same limit as the third limit. A fourth limiting structure matched with the positioning structure; a fifth limiting structure and a sixth limiting structure cooperating with each other are respectively provided on two opposite surfaces of two adjacent growth plates. The carrier of the utility model cooperates with each other by means of the first to sixth limiting structures, so that the connection is firm, the dislocation or tilt is not easy to occur, and the carrier has the advantages of few parts and easy disassembly and assembly.
priorityDate 2019-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 25.