http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-210071890-U
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcd6751522ae6f6f6be632c54a3b6ba2 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate | 2018-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2020-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c0b846c231d2f9a8b20ac0c591fbfe3 |
publicationDate | 2020-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-210071890-U |
titleOfInvention | Wafer test probe station and equipment |
abstract | The embodiment of the utility model discloses wafer test probe station and equipment relates to silicon wafer test technical field, can be applicable to the fixing to the wafer among the vacuum test environment. The method comprises the following steps: and the bearing platform is provided with a pressure ring for fixing the wafer. The utility model is suitable for an among the capability test of semiconductor, photoelectric components, integrated circuit etc., the specially adapted is to the test of wafer. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112903022-A |
priorityDate | 2018-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 15.