http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-209766123-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e61dd9097ef0c42d9e8c1fd4e1d1ec3c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-30 |
| filingDate | 2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_786f94bd25d3d6cf252896ea4739ea8e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96cde1b6948d9acaed9f0212dbd217de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9b51252665d126b1d5d128008f69bd5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f419997b54aa8a1aef07e6de98b289c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94f7e272a66b317d493dc449b5a1d8b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d982b8630521fbdab44d4981b18fbac7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04fa02ef838965eeaf1cbe6d1dcbd554 |
| publicationDate | 2019-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-209766123-U |
| titleOfInvention | machining device for microscale ITO electrode |
| abstract | The utility model discloses a processingequipment of microscale ITO electrode belongs to microelectrode processing technology field, and this etching device includes purification module, drying module, plasma cleaning module and sculpture process monitoring circuit module. An organic matter removing and purifying unit for removing organic matters on the surface of the ITO glass sheet and an inorganic matter removing and purifying unit for removing inorganic matters on the surfaces of the ITO glass sheet and the PDMS sheet; the drying module is used for drying the ITO glass sheet and the PDMS sheet; the ITO glass and the PDMS sheet are bonded after being processed by a plasma cleaning module to obtain a microfluidic chip; the etching process monitoring circuit module is used for monitoring and displaying whether the microfluidic chip completes etching of the ITO glass or not, and the device can etch a high-precision electrode with the minimum width of 1 micrometer on the ITO glass sheet; the etching process is monitored in real time through the on-off of the LED lamp beads, and the problems of insufficient etching, excessive etching and the like are avoided. |
| priorityDate | 2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.