| abstract |
A kind of fluorine gas, hex and nitrogen hybrid standard sample compounding system, including insulating box, insulating box are provided with solid-state hex, and when use is heated to 80 DEG C of vaporizations, and accurately control sample amount by liquefaction valve in insulating box and needle-valveļ¼It and is that gaseous fluorine gas, nitrogen pass through fluorine gas pipeline respectively, nitrogen pipeline enters in insulating box, and control on-off by the valve on pipeline under room temperature. |