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filingDate 2019-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cebbbbd015f5bc7e6495ab8113cea6e
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publicationDate 2019-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-209507560-U
titleOfInvention A processing system for steel cylinders for high-purity orthosilicate
abstract The utility model provides a steel cylinder processing system for high-purity ethyl orthosilicate, comprising: a steel cylinder; a high-purity water storage tank connected with the steel cylinder; a waste water tank connected with the steel cylinder; an ion exchange resin storage tank connected with the steel cylinder ; The ion exchange resin recovery tank connected with the steel cylinder; the high-purity protective gas storage tank connected with the steel cylinder; the ultrapure water storage tank connected with the steel cylinder. Compared with the prior art, the utility model first cleans and removes the particles in the steel cylinder by high-purity water, and then removes the metal ions and chloride ions in the steel cylinder by ion exchange resin, so that the ion content is less than 0.1ppb, and then cleans and removes them by ultra-pure water. Particles that may remain in the cylinder, so that the metal ions, moisture and particle size in the cylinder can reach the optimum level, which is suitable for filling with high purity ethyl orthosilicate.
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