| abstract |
One embodiment of the utility model provides a kind of preparation facilities of disilane, including filter element, first rectifying column, Second distillation column and reactor；Wherein, the first rectifying column is connected with the filter element, and the Second distillation column is connected with the first rectifying column, and the reactor is connected with the Second distillation column.The device of one embodiment of the utility model can prepare the high-purity disilane for meeting semicon industry application using polysilicon raffinate as raw material. |