http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-207652676-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03e90de0e12d1ab315f245616a5f43f7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R1-28 |
| filingDate | 2017-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dd41bb080bc61e413b88465feac6113 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_420a17df822796e0036c9db114039b11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12276a03baaa34e34f2b6ef651275c40 |
| publicationDate | 2018-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-207652676-U |
| titleOfInvention | A kind of MEMS microphone |
| abstract | The utility model discloses a kind of MEMS microphones, including substrate, the first vibrating diaphragm, the second vibrating diaphragm, and seal chamber is formd between the first vibrating diaphragm, the second vibrating diaphragm；Backplane unit is located in seal chamber and constitutes capacitor arrangement with the first vibrating diaphragm, the second vibrating diaphragm, and multiple through-holes for penetrating through its both sides are provided on backplane unit；Wherein, it is less than the gas of air filled with the coefficient of viscosity in seal chamber.The MEMS microphone of the utility model, the gas for being less than air by filling the coefficient of viscosity in seal chamber, can substantially reduce acoustic resistance when two vibrating diaphragms are moved relative to backplane, to reduce the noise of microphone.Meanwhile being filled using the gas of the low coefficient of viscosity so that the pressure in seal chamber can be allowed consistent with the pressure of external environment, avoid the performance that ensure that microphone due to vibrating diaphragm deflection issues caused by pressure difference. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109714690-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109905833-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110012409-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109905833-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112970272-A |
| priorityDate | 2017-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.