http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-207540262-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3119c961f7474950e9eed96c9b124e46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B9-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B21-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B21-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B21-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B25-12 |
| filingDate | 2017-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7b0dddc5a905bbbb99a5cf006125fea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_195d74401878674a5e35a19b3417a77e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_977e2e86a8d61209429bdf0441de1791 |
| publicationDate | 2018-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-207540262-U |
| titleOfInvention | A kind of special PI anaerobics curing oven of integrated circuit wafer grade |
| abstract | The utility model discloses a kind of special PI anaerobics curing ovens of integrated circuit wafer grade, including babinet, the babinet side is equipped with control cabinet, control panel is equipped on front side of the control cabinet, the top of the box is equipped with buzzer, the box house is equipped with load body and lower thorax body, and the lower thorax body is set to body bottom of loading, dodge gate is equipped on front side of load body and the lower thorax body.The utility model air blast circulating fan is extracted and is passed through by exhaust tube the hot wind of absorption back out fresh nitrogen that air outlet pipe drains into nitrogen inlet and supplements and converges, a part of gas carries the waste that drying and processing generates and is discharged from exhaust pipe, most of gas enters in air duct, pass through heating element, carry away the heat of heating element, product is evenly heated in into load body and lower thorax body, then it is sucked back again by air blast circulating fan, such cyclic heating, rapidly and efficiently, when cooling, is passed through high pressure nitrogen circulating cooling for heating. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107843073-A |
| priorityDate | 2017-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.