| abstract |
The utility model discloses a kind of device for preparing electron level trichlorosilane.Wherein, the device includes：Reactor, reacted for the derivative of aromatic aldehyde or aromatic aldehyde and raw material trichlorosilane；Purifying column, for the reaction product in reactor first to be removed into part heavy constituent, removes light component again and remaining heavy constituent obtains electron level trichlorosilane；And absorption purifier units, for trichlorosilane further to be gone into the removal of impurity, obtain electron level trichlorosilane.Using the technical solution of the utility model, the shortening flow of this technique greatly, equipment investment and operation energy consumption are reduced, product quality reaches electron level. |