http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-205687546-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6a6f422b091ba12ea61d4adbf1b0e8e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-093 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate | 2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41a44e264f6a6fca072c1fefb2d019b6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0edd02021b1317f7a2ae1492a100977a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9765bb210c5e2860c18ae7f022146ea8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0611fce92a4651267a3e5b4a5209d50b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbef82e391aeaa31ad57a79440c20f14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85125834455f0758af6f654e0211478f |
| publicationDate | 2016-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-205687546-U |
| titleOfInvention | The micromechanics sensitive structure of a kind of superelevation acceleration displacement sensitivity and accelerometer |
| abstract | The utility model discloses micromechanics sensitive structure and the accelerometer of a kind of superelevation acceleration displacement sensitivity.Micromechanics sensitive structure includes sensitive-mass block, the high-reflecting film being plated on sensitive-mass block, the snakelike beam type cantilever beam being connected on sensitive-mass block mutually and the silicon base being connected with snakelike beam type cantilever beam end, micromechanics sensitive structure bottom is connected with substrate with groove, and snakelike beam type cantilever beam is mainly sequentially connected is constituted by spanker boom, the first wriggle beam, the second wriggle beam, four straight beams of shin beam.This utility model achieves the acceleration displacement sensitivity of superelevation, and still ensure that less off-axis crosstalk, micro fabrication can be with IC process compatible, flow rate is high, it is prone to high-volume make, coordinates displacement read-out system based on grating interference chamber can realize acceleration analysis sensitivity and the precision of superelevation. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107389981-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107389981-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105858585-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107131819-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107131819-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105858585-B |
| priorityDate | 2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.