http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-205069600-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e6cc42bb2719da1d60772d005416f5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2015-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b0b5d0f6faceae1eb3dd57d209921e9 |
| publicationDate | 2016-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-205069600-U |
| titleOfInvention | Base plate processing apparatus and be used for its mixing nozzle |
| abstract | The utility model relates to a base plate processing apparatus and be used for its mixing nozzle provides a base plate processing apparatus and be used for its mixing nozzle, and it includes: the gaseous passageway of supplying with, it is regional with the discharge that it includes that the cross -section reduces, the cross -section reduce regional along gas the flow direction and the cross -section reduces gradually, the discharge is regional follows the cross -section reduces the region and prolongs to the discharge port, the fork passageway (diverged passage), its with the gaseous passageway of supplying with communicates (connected) and supplies with dry ice in the primary importance, thereby the dry ice that the cross -section reduces regional accelerated gas flow and solid state passes through jointly the discharge port can be discharged, from this, in the surface of not damaging the base plate, can effectively get rid of the foreign matter of lower ground set in the boundary layer below on surface. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113118951-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109564865-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109564865-A |
| priorityDate | 2015-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.