http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-204067350-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f823f036721e39c61ff0ced537273b8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2014-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e77b36b524700171d4b7a85d181bc65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8b055f90142a0eb64cb7da5ee414ee2 |
| publicationDate | 2014-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-204067350-U |
| titleOfInvention | A kind of test structure of plasma-induced damage |
| abstract | The utility model provides a kind of test structure of plasma-induced damage, at least comprise: be positioned at same layer and multiple transistor devices arranged in parallel, the substrate of described transistor device is electrically connected to the first detection welding pad, the source electrode of described transistor is electrically connected to the second detection welding pad, the drain electrode of described transistor device is electrically connected to the 3rd detection welding pad, the grid of described transistor device and the metal wire one_to_one corresponding of different layers are electrically connected, the metal wire of every one deck is branched off into the first sub-metal wire and the second sub-metal wire, wherein the first sub-metal wire is electrically connected to the antenna end of respective layer, second sub-metal wire is all electrically connected to the 4th detection welding pad.Utilize test structure of the present utility model, once can complete assessment and the monitoring of all process layers, save the testing time, and this structure footprint is little, compatible with existing manufacture craft, be applicable to suitability for industrialized production. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115632044-B |
| priorityDate | 2014-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.