http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-203894369-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f823f036721e39c61ff0ced537273b8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-12 |
| filingDate | 2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b94f537b0aac530eb20b0be9c89caaf1 |
| publicationDate | 2014-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-203894369-U |
| titleOfInvention | Test structure for testing MIM capacitor devices |
| abstract | The utility model provides a test structure for testing MIM capacitor devices. The test structure comprises a first MIM capacitor structure, a second MIM capacitor structure, a first test welding pad, a second welding pad and a third welding pad; the first MIM capacitor structure has the same structure as the second MIM capacitor structure, the first MIM capacitor structure comprises a first metal electrode, a dielectric layer and a second metal electrode which are successively laminated, and the second MIM capacitor structure comprises a first metal electrode, a dielectric layer and a second metal electrode which are successively laminated; and the first test welding pad is electrically connected with the first metal electrode of the first MIM capacitor structure, the second test welding pad is electrically connected with the second metal electrode of the second MIM capacitor structure, and the third test welding pad is electrically and separately connected with the two metal electrodes of the first and second MIM capacitor structures. In the test structure, provided by the utility model, for testing the MIM capacitor devices, the two MIM capacitor structures having the same structure are adopted, and breakdown voltage tests can be performed from front and reverse directions of the MIM capacitor structures, so accuracy of breakdown voltage measurements is guaranteed. |
| priorityDate | 2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.