| abstract |
The utility model discloses a disk-like object holding device and a disk-like object rotating platform. The disk-like object holding device comprises a holding portion, a lifting and lowering portion, and a lifting and lowering executing device. The holding portion comprises an annular body movable base. The movable base can be moved up and down, and a plurality of clamping elements are distributed on the movable base in the circumferential direction. Supporting elements are arranged under the clamping elements, wherein the supporting elements are matched with the clamping elements for bearing a disk-like object. The clamping elements and the supporting elements can be in vertical movement relatively. The lower end of the lifting and lowering portion is connected with the lifting and lowering executing device for driving the up-and-down movement of the lifting and lowering portion. The upper end of the lifting and lowering portion is used to control the up-and-down movement of the movable base. According to the utility model, the distance between the clamping elements and the supporting elements is controlled through the up-and-down movement of the lifting and lowering portion so as to realize the opening and closing of a silicon wafer. According to the utility model, a new type holding device is provided on the basis of an existing electromagnetic suspension platform, the movement mode is simple, a mechanical arm can be used to conveniently take and put the silicon wafer and hold the silicon wafer so as to make the silicon wafer maintained in the high-speed rotataion state on the suspension platform. |