http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-203658725-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4e73e6123b4177e11d89da8ad578a0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a62555ff12316a9a118542896b4c0af7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-38 |
| filingDate | 2014-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad093592746640199e5884d05a390a42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e7cf9221d8e6d94dbb5d641890f00b6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca970ae954a3db459d679cebc1e2b5d6 |
| publicationDate | 2014-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-203658725-U |
| titleOfInvention | Mask plate |
| abstract | The utility model relates to the technical field of masks and in particular relates to a mask plate. The mask plate is long in service life, and the problem that the thickness of photoresist which corresponds to a semi-light-transmitting area is not uniform after exposure can be lightened. The mask plate comprises a substrate, a light-blocking mask layer on the substrate, and at least one micro-pore group formed in the light-blocking mask layer, wherein each micro-pore group forms a semi-light-transmitting area on the light-blocking mask layer and comprises multiple light transmitting holes; the light intensity of the edge of the adjacent light transmitting hole can be enhanced by each light transmitting hole, so that light rays passing through each light transmitting hole are uniformly distributed in the semi-light-transmitting area. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020103187-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11353787-B2 |
| priorityDate | 2014-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.