http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-203174221-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_494dfea367adc70e846ac0ef9d8a3442 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-06 |
| filingDate | 2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3150dd27c0e311160d1773c4f118054 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_158ff9b69b792270bc1f36433c1eb7c0 |
| publicationDate | 2013-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-203174221-U |
| titleOfInvention | Device for rapidly preparing crystal epitaxial films |
| abstract | The utility model discloses a device for rapidly preparing crystal epitaxial films. The device comprises a vacuum chamber, a vacuumizing system, a reaction magnetron sputtering epitaxy device and a rotary type film growing device, wherein the reaction magnetron sputtering epitaxy device consists of a cathode part, an atom source anode, a gas guide part and a power supply; and the cathode part comprises at least one cathode, a metal or a semiconductor target on the cathode, and a magnetic-control loop. The device has the beneficial effects that the preparation time of epitaxial wafers is greatly shortened, epitaxial films with high quality and few defects are rapidly prepared with low cost, and meanwhile, raw materials and equipment with low price are used, the growing velocity is increased, the manufacturing period of the epitaxial wafers is shortened, the output of the epitaxial wafers is directly increased, and the cost of the epitaxial wafers is lowered. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103276443-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103276443-B |
| priorityDate | 2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.