http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115398336-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-167
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
filingDate 2021-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d18c91360c2db76e5cd3317246f59761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccecb9081238485b29985aa6e3494afc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b37b9a4fde4a1899d267248b2b3d9e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac4a4d355771ba8d6b733ee6d5b530fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a1369c00203f5cb5ce3c94d16e35fae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23f841027ba00266e6500db3c831ee22
publicationDate 2022-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-115398336-A
titleOfInvention Device and process for sensitizing EUV dry resist with gas phase injection sensitizer
abstract The present disclosure relates to stacks having sensitized resist films, and methods and apparatus for applying such sensitized films. In certain embodiments, the sensitizer may be provided in gaseous form, and unreacted sensitizer precursor may be recovered after the deposition step.
priorityDate 2020-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457634710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101175
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456485227
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14016
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523933
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16684220
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415807310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457653144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545597
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456485349
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12955
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521450
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530116
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457802510
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456468049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11661
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457484625
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9162
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457481844
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862737
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457505229
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID231360
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10006
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID142739608
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66583054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457802656
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456489053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150604042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733501
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457460012
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150425858
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554831
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456373396
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578768
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457797657
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426228308
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6506397
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370949
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457465597
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457465615
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426228407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426644922
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426757978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID807
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457489024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526621
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546358
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327258
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15620793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418598929
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414874683
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID152774264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11704
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID129653556
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456375593
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5364545
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457465454
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID567658
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456375512
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457459970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457653642
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431909395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419697486
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426758201
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450969621
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9798523
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457630696
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394891
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415725167
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID134664
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578752
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154084589
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453879819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457629081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578742
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449973638
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20485906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456373419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456425554
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7940
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14276
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457634752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414806636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457520514
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456373263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549771
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12726601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421135197
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457797546
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457521263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421334983
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431914946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415830121
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID108196
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457802997
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456366051
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859587
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16699388
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID152005402
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414871913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370038
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559349
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID80932
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID167232
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415742637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423390529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68120
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414672094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393767
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14776
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415771500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29923775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593286
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416723669
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414812050
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457651511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415806325
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3344189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416935462
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452945096
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420131208
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16685252
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID42619
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579412
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419475588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456485588
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9548819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457490912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457804113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415807309
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410538340
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456554079
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2734139
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426757808
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161213
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457803643
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393328
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457803824
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455500969
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456636940
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6432000
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456636572
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456485589
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16688853
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23991
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416155654
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411906603
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393332
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416014660
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426266294
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457633951
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101940
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16716855
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408747239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID432846464
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6693
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457633272
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426081264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101941
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13483567
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457633337
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID50930996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419633049
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393652
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456485498

Total number of triples: 212.