| abstract |
Methods and apparatus for forming reflective films are described herein. A liner is formed on the surface of the substrate, followed by a reflective layer, such that there is no oxygen exposure between the formation of the liner and the reflective layer. In some embodiments, a high aspect ratio structure is filled with a reflective material by partially filling the structure with a reflective material while inhibiting growth at the top of the structure, reactivating the top of the substrate, and then filling the structure with a reflective material. |