http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115207776-A

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filingDate 2022-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-115207776-A
titleOfInvention A kind of semiconductor epitaxial structure and its growth method
abstract The present application relates to the field of semiconductor technology, and in particular, to a semiconductor epitaxial structure and a growth method thereof. The semiconductor epitaxial structure includes: a semiconductor substrate layer; a lower waveguide layer located on the semiconductor substrate layer; an active region located on the lower waveguide layer, the active region including an indium gallium aluminum arsenic quantum well layer and a potential barrier layer, the barrier layer is located on both sides of the quantum well layer, and the barrier layer is one or more combinations of gallium arsenide, aluminum gallium arsenide or gallium arsenide phosphorus; located in the active region on the upper waveguide layer. The present application avoids the segregation of indium in the active region at high temperature, and improves the stability of the laser.
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