http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115148705-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5b43f4a86fc8f7ad28689d833acac53 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5386 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-482 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-538 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
| filingDate | 2022-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b66eed94b9e9ea2a10f0ee67d6e497d8 |
| publicationDate | 2022-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-115148705-A |
| titleOfInvention | Semiconductor structure and method of making the same |
| abstract | Embodiments of the present disclosure disclose a semiconductor structure and a method for fabricating the same. The semiconductor structure includes: a substrate including a plurality of active regions; a bit line structure located above the active regions, the bit line structure including a plurality of bit lines extending along a first direction and a plurality of contact plugs, the contact plugs electrically connecting the bit lines and the active region, the first direction being parallel to the surface of the substrate; an isolation structure, the isolation structure includes a first insulating layer, a second insulating layer and a third insulating layer; the first insulating layer includes a first part and a second part located under the first part; the first part covers at least The side wall of the bit line, the second part covers at least the side wall of the contact plug; the second insulating layer covers the surface of the second part, and the third insulating layer covers at least the first part. part of the surface. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116568031-A |
| priorityDate | 2022-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.