abstract |
The present invention provides a sheet (101) for workpiece processing, comprising a base film (11) and an adhesive layer (12) on the base film (11), wherein the adhesive layer (12) contains metal soap and adheres to The metal content per unit area of the agent layer (12) is 0.0004 μg/cm 2 or more. The metal soap is preferably a fatty acid zirconium salt, a fatty acid zinc salt, a fatty acid aluminum salt or a fatty acid nickel salt, and the fatty acid as the fatty acid metal salt of the metal soap preferably has 5 to 20 carbon atoms. |