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filingDate 2022-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_416a3b848f275cfadcfc35f4c9bce7b7
publicationDate 2022-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-115141687-A
titleOfInvention Surface treatment composition, method for producing surface treatment composition, method for surface treatment, and method for producing semiconductor substrate
abstract The present invention relates to a surface treatment composition, a method for producing the surface treatment composition, a method for surface treatment, and a method for producing a semiconductor substrate. [Subject] To provide a solution that can sufficiently remove organic residues existing on the surface of a polished object made of silicon nitride or polysilicon. [Solution] A surface treatment composition for treating the surface of a polished object, comprising: a polymer having a structural unit represented by the following formula (1), At least one of an anionic surfactant and a nonionic surfactant, and water, in the following formula (1), R 1 is a hydrocarbon group having 1 to 5 carbon atoms, and R 2 is a hydrogen atom or a carbon number of 1 to 1. 3 hydrocarbon groups.
priorityDate 2021-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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