http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115127457-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fbdc51c2665335e616caf341cdaa3d28 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3343 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0608 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_766b10489d2ecd6aa2c835a5a5ae2360 |
| publicationDate | 2022-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-115127457-A |
| titleOfInvention | Detection device, system, method and plasma processing device of focus ring |
| abstract | The invention relates to a detection device for a focus ring, comprising: a first adjustable mechanism, which is placed above the bearing surface of the base and can move in the direction perpendicular to the bearing surface; Connected above, the reflective structure can rotate around its first end; and the acute angle formed by the reflective plane of the reflective structure and the bearing surface is the second angle; the light source is arranged above the reflective structure to emit light to the reflective structure along the direction perpendicular to the bearing surface , the light can be reflected by the reflective structure and the inner side of the focusing ring; the detection module is arranged above the reflective structure and used to receive the reflected light reflected by the reflective structure and the inner side of the focusing ring. The invention measures the height and shape of the focus ring by means of optical detection without opening the reaction system, controls the angle and height changes of the reflective structure through remote connection, does not damage the vacuum environment of the reaction chamber, and is easy to operate. It is convenient and quick, and the detection accuracy is improved. |
| priorityDate | 2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863 |
Total number of triples: 18.