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filingDate 2022-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2f1d3ae2b71e34510583404506d02f2
publicationDate 2022-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-115083845-A
titleOfInvention MEMS and MEMS switches
abstract Embodiments of the present disclosure relate to MEMS and MEMS switches. In an exemplary aspect disclosed herein, the movable beam includes a body and a contact having higher electrical conductivity and stiffness than the body. The contacts extend continuously between the input terminal electrodes and the output terminal electrodes and electrically couple the contacts of the movable beam with the input terminal electrodes and the output terminal electrodes. The different materials between the body and the contacts allow inclusion of the mechanical properties of the body (eg, to reduce mechanical fatigue, creep, etc.), while taking advantage of the electrical properties of the contacts (eg, to reduce contact on-state resistance). Thus, the MEMS switch provides low resistive losses during the on state while maintaining a high level of isolation during the off state.
priorityDate 2021-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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