http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115083845-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6409e25ad5decbd043ed7439fbf842ed |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H2001-0084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-016 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H2059-0036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01P1-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H2059-0027 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H1-0036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H59-0009 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H59-00 |
filingDate | 2022-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2f1d3ae2b71e34510583404506d02f2 |
publicationDate | 2022-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-115083845-A |
titleOfInvention | MEMS and MEMS switches |
abstract | Embodiments of the present disclosure relate to MEMS and MEMS switches. In an exemplary aspect disclosed herein, the movable beam includes a body and a contact having higher electrical conductivity and stiffness than the body. The contacts extend continuously between the input terminal electrodes and the output terminal electrodes and electrically couple the contacts of the movable beam with the input terminal electrodes and the output terminal electrodes. The different materials between the body and the contacts allow inclusion of the mechanical properties of the body (eg, to reduce mechanical fatigue, creep, etc.), while taking advantage of the electrical properties of the contacts (eg, to reduce contact on-state resistance). Thus, the MEMS switch provides low resistive losses during the on state while maintaining a high level of isolation during the off state. |
priorityDate | 2021-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.