http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115078461-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e6675ac9702ea17b66e5adbf3f0dfa05 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 |
| filingDate | 2022-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6427cd091151d9d179b6427cf8eb9eef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_474f37585d02a955932a12a8b7af8bae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_170c38b477b4ccbd0bbca8be751b606c |
| publicationDate | 2022-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-115078461-A |
| titleOfInvention | Hydrogen MEMS sensor for power battery detection and preparation method thereof |
| abstract | The invention discloses a hydrogen MEMS sensor for power battery detection and a preparation method thereof. The preparation method comprises: mixing tin tetrachloride, a doped metal salt containing palladium chloride, and deionized water, and adding a curing agent and a dispersing agent Stir, heat up and stand to obtain a gas-sensitive material slurry; protect the electrodes on the silicon wafer with photoresist, and use a slit coater to coat the slurry on the surface of the silicon wafer to obtain a film-coated silicon wafer; during coating, The vacuum degree of the slot coating machine is ≤1.33× 10-2 Pa, the moving speed of the nozzle is 60-70mm/min, and the size of the nozzle of each nozzle is 5μm×1μm to 5μm×2μm; The film thickness is 1-3 μm; the coated silicon wafer is annealed to room temperature, the photoresist protecting the electrode is removed, and then cut, welded and packaged. The sensor prepared in the invention has high hydrogen detection sensitivity and short response time, and can meet the hydrogen detection in power battery detection. |
| priorityDate | 2022-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.