| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89b170728e9b1de7f20c98f2fbc2a113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6813f68bbadbcaae3828aa035190fede |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2021-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efd5370ea53eb424a0ac0aa69c883845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a1e4e729af35917ef626517db58ba79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5622191e99e2f98655d6bb99dce681c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_168f8fe0d6b874ad44552064e1f064fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d88175de785cac67c413ae4338aed598
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c5314f61cf04140c5fe33562c10e124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67c348598a91a77608900acdbddc5229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05dbe4d39d0daa7f9a2dadc15dbcf77c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51cffe52979b96db83815c55fdb89197
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_865f29b57d5e9af7dfcd0f44ba953be0 |
| publicationDate |
2022-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-115066736-A |
| titleOfInvention |
Method and apparatus for pulsed inductively coupled plasma for surface treatment processing |
| abstract |
The present disclosure provides apparatus and methods for treating workpieces using plasma. In an exemplary embodiment, the apparatus may include a processing chamber. The apparatus may include a plasma chamber defining a dielectric tube with sidewalls. The apparatus may include an inductively coupled plasma source. The inductively coupled plasma source includes an RF generator configured to excite an induction coil disposed around the dielectric tube. The apparatus may include a separation grid separating the processing chamber from the plasma chamber. The apparatus may include a controller configured to operate the inductively coupled plasma source in a pulsed mode. In pulsed mode, the RF generator is configured to apply multiple pulses of RF power to the induction coil. The pulse frequency may range from about 1 kHz to about 100 Hz. |
| priorityDate |
2020-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |