http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115032241-A

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filingDate 2022-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76ab00e8278964e128fa7fc8c67f0067
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publicationDate 2022-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-115032241-A
titleOfInvention A low-power light-excited gas sensor and preparation method thereof
abstract A low-power consumption light-excited gas sensor and a preparation method thereof of the present invention include: a light-trapping substrate with a sensitive film disposed on its top surface; a light-excitation device, the light emitted by the light-exciting device irradiates the light-trapping substrate and the sensitive film Above, the photoexcitation device is used to excite electron-hole pairs in the sensitive film; the sensitive film includes a surface metal oxide film, a metal catalyst film, and a bottom metal oxide film that are stacked in sequence, and the metal catalyst film is used for the gas to be measured. Molecules are adsorbed and reacted, and surface plasmon resonance (SPR) is excited under the irradiation of the optical excitation device. The surface metal oxide film and the underlying semiconductor film are of the same or different types, and the underlying metal oxide film and the The light trapping substrate is attached; the electrodes are two and are arranged on the top surface of the surface metal oxide film. The gas sensor of the present invention has the beneficial effects of strong stability and low power consumption.
priorityDate 2022-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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