Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45591 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45502 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
filingDate |
2017-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c831012e04718c6061bda227998fc2a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78e08906f4cf6a1a02c756f43948f2c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0094243bcd65b5a69b0e88dd1c2a8973 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01e80ea8e48fe94868e3b6040617f6ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04be56a9d142d17374c31321a508079 |
publicationDate |
2022-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-114975176-A |
titleOfInvention |
Chemical Delivery Chamber for Self-Assembled Monolayer Process |
abstract |
Embodiments described herein relate to apparatus and methods for self-assembled monolayer (SAM) deposition. The apparatus described herein includes a processing chamber having various gas phase delivery devices fluidly coupled to the processing chamber. The SAM precursor can be delivered to the processing volume of the chamber via various devices that are heated to maintain the precursor in the gas phase. In one embodiment, a first ampoule or vaporizer configured for delivery of the SAM precursor may be fluidly coupled to the processing volume of the processing chamber. A second ampoule or vaporizer configured to deliver a different material than the SAM precursor can also be fluidly coupled to the processing volume of the processing chamber. |
priorityDate |
2016-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |