http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114967341-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1077735f6d4dd4bb75ceeb9b5b88f01c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_422ff3771dab2a772792e89b9ed5bc63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1925da4d04f99275b745fa6137d8775a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccea23eea5d96831ae5f01a825636cb1 |
| publicationDate | 2022-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114967341-A |
| titleOfInvention | Positive photosensitive resin composition for low temperature process and method for manufacturing photoresist film |
| abstract | A positive-type photosensitive resin composition for low-temperature process comprises alkali-soluble phenolic resin, a compound having a quinonediazide group, a mixed solvent and at least one additive. The mixed solvent includes a first solvent and a second solvent, the first solvent has a volatilization speed of more than 50 relative to the volatilization speed of n-butyl acetate 100, and the second solvent has a boiling point between 150°C and 200°C. At least one additive has a molecular weight of 500-5000 and a structural unit as shown in formula (I), wherein R1 is selected from the group consisting of hydrogen, hydroxyl, C1-C5 alkyl, phenyl, halogen atom, cyano group, and R2 is selected from The group consisting of free hydrogen, acid radical, benzene and its derivatives, phenols, benzoic acid and its derivatives, and aromatic heterocycles, and n is 10-80. The present disclosure also provides a method for manufacturing a photoresist film, |
| priorityDate | 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 151.