http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114965974-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c397f39d182a98fa5eaf828d0ad5ce0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-13 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-48 |
| filingDate | 2022-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_371aac397f77327381251de4890ef6b1 |
| publicationDate | 2022-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114965974-A |
| titleOfInvention | A kind of micro-nano array electrode and its preparation method and intracellular electrical signal sensing application |
| abstract | The invention discloses a micro-nano array electrode, a preparation method thereof, and an intracellular electrical signal sensing application. Compared with the current three-dimensional micro/nano device, the nano-pillar micro-electrode array device based on the PET porous film of the present invention has a simple process and is favorable for large-scale processing. On the one hand, thanks to the introduction of scalable PET porous membranes, nanoscale structures can be fabricated on large-area substrates by atomic layer deposition and plasma etching. Sputtering and lift-off technologies avoid complex, time-consuming, and expensive processes such as electron beam exposure and ion beam etching, and are conducive to low-cost commercial manufacturing. |
| priorityDate | 2022-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.