| abstract |
The invention discloses a humidity sensor with a nano-gyro-shaped structure array in the technical field of humidity sensors and a preparation method thereof. The disk array of the disk SPP mode, the F_P mode of the nano-gyro-shaped structure array and the disk SPP mode of the disk array are superimposed to form a Fano mode, the nano-gyro-shaped structure array is also provided with a water-absorbing material, and the water-absorbing material In the air of different humidity, the resonant mode of the nano-gyro-shaped structure array is changed by the change of its own water absorption, so that the nano-gyro-shaped structure array reflects different colors of light under illumination. The invention solves the defects of short life, poor stability, low precision and poor repeatability of the existing sensor. |