http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114962197-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1776b91be1c4e0bfb6e4dfa95c96b91 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E30-10 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F03H1-0081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F03H1-0031 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F03H1-00 |
filingDate | 2022-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff4bd8e8287d38dab50ab6728ee01348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31ddeb48014770a114cb605e41aa824c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0af0baa8c346fe3982fa28bad712ccb7 |
publicationDate | 2022-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-114962197-A |
titleOfInvention | A steady-state discharge device for helical wave plasma source with cooling function |
abstract | The invention discloses a steady-state discharge device of a helical wave plasma source with cooling function. Bulk and helical wave plasma sources. The helical wave plasma source includes a discharge chamber running through the cooling cavity, annular permanent magnets nested in the middle and tail section cavities, an antenna located inside the cooling cavity and surrounding and close to the outer wall of the discharge chamber, and the radio frequency power supply and the antenna are connected And penetrate the electrode rod of the head end panel. The cooling liquid inlet and outlet are arranged on the outer surface of the head end panel of the cooling cavity and communicated with the cooling cavity. The invention effectively reduces the temperature of the antenna when the helical wave plasma source operates at the kilowatt-level power, effectively reduces the influence of the internal temperature of the cooling cavity on the magnetic field of the annular permanent magnet, and realizes the long-term steady discharge of the kilowatt-level helical wave plasma device. And demonstrated the possibility of applying permanent magnets to high-power helical wave plasma sources. |
priorityDate | 2022-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 |
Total number of triples: 17.